AZ3571 & AZ4571, Diaphragm Valve, Air Operated, Two Step
Series AZ3571 & AZ4571 are a Two Step, ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated.
- Two step mode - metered flow and full open
- Two separate actuation ports
- Soft start valve to minimize vacuum chamber pressurization turbulence
- Metered flow adjustable
- Pneumatically actuated normally closed
- Body material: 316L SS
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