Process Gas Pressure Regulators
High purity (UHP) regulators used for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
Process Gas Equipment
Our process gas products deliver the reliability, purity, and control critical for applications such as advanced chip fabrication. From high-purity specialty gases to integrated gas delivery systems, our solutions support every stage of manufacturing — ensuring consistent performance, minimal contamination, and optimal yield. Explore our full range of valves, regulators, and check valves designed to meet stringent standards.
Process Gas Pressure Regulators
High purity (UHP) regulators used for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
Diaphragm Valves
High purity (UHP) diaghram valves used for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
Check Valve/Vacuum Generator/Flow Switch
High purity (UHP) check valves/vacuum generators/flow switches are used for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.